RF-Powered RUV/VUV Flow LampSpecificationsOperating Procedures (normal operation)The flow lamp can be operated with any non-corrosive gas to obtain EUV spectra. Typically, the supply line is pressurized to a few PSI above ambient pressure (10 to 100 kPa). To operate:1. Connect gas supply lineConnect the input (the green valve) to green valve that is connected to the metering valve. Make sure the second Green valve is closed.2. Pump out the gas supply lineOpen the input valves (green and the black metering valve) to pump out the supply line up to the pressure gauge head. The pressure should fall to better than 10^-1Torr in the mono/spectrometer at this stage.3. Purge the supply line with gasThe main cylinder valve to the gas supply should be opened and the two valves (green and black metering valves) closed.4. Adjust the flow of gasIn normal operation (with Ar, Xe, Kr, Ne, He, or N2) the green valve connected to the metering valve should be opened and the metering valve set so that the flow of gas is quite small (10 to 35 small div). This will maintain pressure at a few Torr in the flow lamp and less than 10^-1Torr in the mono/spectrometer.5. Switch on the RF in the flow lamp and start the lampAfter the gas is flowing the RF should be switched on by plugging in the wall unit. If a power supply is used the voltage should be set to 24 volts and the current should be in the 0.2 to 0.75-amp range. The plasma will be self-starting. If the lamp will not start, verify that the power supply is properly connected and functional and that there is a sufficient vacuum (the lamp will not start when this pressure is > ~1 Torr). If the lamp still will not start, a Tesla coil (set on low) can be touched to the glass tube inside the lamp housing.6. Optimize the intensityOnce the plasma is ignited, adjust the gas flow using the metering valve to quickly optimize the intensity.Calibration in Normal Operating ModeVUV Flow Lamp with Br2 Flow24-Watt RF Fiber-Optic-Output Light SourcesKrLP-LFO & NeLP-LFOOperating Procedure1. Connect fiber optic cable to both lamp and receiving instrument2. Plug DC power supply into 110V supply3. Connect the 9 pin connector to the lamp. The lamp will start immediately along with the built in cooling fan4. To maximize the bulb life, unplug the unit when not in use5. In the event that the fan stops working do not run the unit as the main transistor can overheat and failTest Spectrum24-Watt RF Light Source with 5cm Parabolic MirrorKinematic Mount Instructions for Parabolic Mirror AdjustmentThe parabolic mirror can be adjusted to precisely aim the reflected VUV light. The mirror uses a kinematic-style mount with 3 adjustment screws and one central locking screw. There is a cap that must be removed to access the adjustment screws:In order to adjust the mirror, loosen the central locking screw by turning it counter-clockwise no more than 1 turn and then loosening/tightening each of the three adjustment screws to change the mirror’s angle. Do not loosen the adjustment screws more than 1 turn at a time.
DescriptionThe Resonance EUV windowless source is an RF-excited flow lamp with a capillary bore in an EMI-shielded enclosure. This lamp mounts to a 2.75 inch or larger CF type flange. The lamp assembly has an integral RF exciter that is powered by a small wall plug power supply. This supply is sufficient to produce, emissions from the principal neutral rare gas species in the range of 1015 photons per second per steradian. This light source employs a “reverse flow” feature that directs the gas away from the vacuum chamber. This feature reduces gas use and produces a higher intensity.