|
Specification
|
Minimum
|
Typical
|
Maximum
|
units
|
|
Gas
Fill
|
|
Krypton
|
|
NA
|
|
Peak
Wavelengths
|
|
116
to
170
|
|
nm
|
|
Full
Spectral
Range
|
Spectrum
|
116.5
to
7000
|
|
nm
|
|
VUV
Intensity
|
4
x
10^16
|
4
x
10^17
|
|
Photons/sec/sr
|
|
Full
Angle
Output
Cone
|
30
|
45
|
65
|
Degrees
|
|
Window
Material
|
|
MgF2
|
|
NA
|
|
Clear
Aperture
of
Window
|
0.4
|
-
|
1.8
|
cm
|
|
Plasma
Depth
Behind
Face
of
Front Flange
|
2.0
|
3.0
|
4.0
|
cm
|
|
VUV
average
intensity
across
input
aperture (207 W input)
|
8.5
|
12
|
15
|
mW
per
cm^2
|
|
Certification
|
NIST
Traceable
Calibration
of
Intensity
|
|
Pulse
|
Modulation
to
1
kHz
available
as option
|
|
Plasma
Diameter
|
0.9
|
-
|
4
|
cm
|
|
Plasma
Length
|
3
|
-
|
10
|
cm
|
|
Input
Voltage
|
70
|
115
|
260
|
VAC
|
|
Input
Line
Frequency
|
50
|
60
|
65
|
Hz
|
|
Input
Power
|
25
|
75
|
120
|
Watts
|
|
Cooling
|
Forced
air
|
|
Intensity
Monitor
|
Intensity
monitor
available
as
an
option
|
|
Thermal
Control
|
na
|
|
Mounting
Flange
|
6"
Conflat
is
standard,
lamp
can be sealed to UHV system
|
|
System
|
Complete
system
includes
power
supply,
EMI shielded enclosure, Vacuum flange and
NIST Traceable calibration
|
