Copyright Resonance Ltd., December 2011
143 Ferndale Drive North, Barrie, ON L4N 9V9 Tel: 705-733-3633 Fax: 705-733-1388 Email:res@resonance.on.ca
Our Xenon filled, RF powered lamp system is a reliable and maintenance free high intensity source of deep VUV emissions
from 150 to 195nm. The system mounts to an easily customizable 350 x 400 mm flange for convenient connection to a HV
or gas flow system. VUV fluxes greater than 10 milliwatts/cm2 are delivered through the 230mm output aperture for use in
applications such as wafer cleaning and LCD panel cleaning.
Click here to lean more about Excimer Cleaning
Ozone delivery is a measure of the total VUV flux generated by the Excimer lamps. REX-4 delivers 1 gram of ozone in 400
seconds when pure dry oxygen is flowed through the reflector housing. In normal operation the reflector is purged with dry
nitrogen or argon to allow maximum transmission of VUV to the working surface.
Flux Transmission at 172nm
Through Aperture with Quartz Window
Through Aperture without Quartz Window
Technical Information
Download the brochure for a complete list of specs and accessories
REX-(4,8) Excimer Lamp
