Copyright Resonance Ltd., December 2011
143 Ferndale Drive North, Barrie, ON L4N 9V9 Tel: 705-733-3633 Fax: 705-733-1388 Email:sales@resonance.on.ca
24W RF-Powered Light Sources
Manual
Operating Warnings
Warning: Eye Hazard
Do not look directly at the light source plasma unless wearing glasses. Normal eyeglasses will block extreme UV of all light
sources except mercury and deuterium. For these light sources use special UV-blocking glasses.
Warning: Avoid Damaging Window Seal
Do not use chloroform, acetone, xylene or vinegar to clean the light source window. Use of these (or similar based solvents) might
dissolve the window or the window seal.
Operating Procedure
For Models L (excluding EUV-XL-L), LOT, LDQ12
1. Inspect the Light Source Window
Inspect the front of the window and clean it if contamination is suspected, according to the window
cleaning instructions found in the section titled “Window Cleaning Instructions”.
2. Pre-Installation Test
It is recommended that the light source be tested prior to installing into your system to verify it turns on properly. Plug the
included power/data splitter into the light source. Then plug the power supply into the power/data splitter’s other free end
labeled “P”. When power is applied, the light source should produce VUV almost immediately. If it does not, or its output
differs from its specifications, refer to the troubleshooting guide found in the section titled “Troubleshooting Guide”.
3. Mount the Light Source
Now that the light source has been successfully tested, it may be installed onto your system. This procedure will vary
depending on the type of flange included.
4. Verify Installed Light Source Turns On
Once the light source has been installed onto your system, it should again be immediately tested to verify it turns on. With
power applied and the power switch on the breakout box flicked “ON”, look through the 1/16” hole in the front section near
the bulb to ascertain whether it is emitting light. Again, if there are any problems please refer to the “Troubleshooting Guide”
section.
Power/Data Splitter
The splitter for the lamp breaks out its 9 pins and provides a connector for power and telemetry via USB separately. Included is a
modulation BNC connector.
Above: Power/Data Splitter, with 24 V Input, RS-232 Telemetry, and Lamp Connector
Power/Data Splitter Pinout
Heater Temperature
By changing the temperature of the source heater, you can control the amount of hydrogen, deuterium, oxygen, nitrogen,
chlorine, OH, NO or CO levels in their respective light sources. This gives the user control over the intensity of the atomic and
molecular emission lines and/or continua in these light sources. In general these sources are delivered with the optimal set up
for the users application. In addition the light source software can be used to adjust the heater temperature in order to trim the
source optical depths or spectral output. In this way one can convert a Lyman Alpha Lamp from a line source to a H2 and H2
continuum source with many VUV lines and a UV continuum. (Reverence spectra provided in A1.)
If you have purchased an Oxygen Nitrogen Chlorine OH NO or CO source please carefully follow the instructions supplied with
the source since overheating can reduce the lifetime of the light source.
RS-232 Telemetry
The USB telemetry output remains active even when the USB interface is being used. This allows for low-level devices such as
microcontrollers interfacing with the light source and even controlling it if necessary. The syntax and baud rate etc. for the
telemetry can be obtained by referring to the light source’s software manual. The port uses standard RS-232 protocol logic levels
so it should be compatible with any other RS-232 port. If directly interfacing to a microcontroller, a converter IC such as a
MAX232 may be necessary to adjust the logic level voltages.
Window Cleaning
The light source window is polished magnesium fluoride and its vacuum ultraviolet transmission will be degraded if it is touched or
otherwise contaminated. In all but the best vacuum systems a slow loss of window transmission will result from photo-
polymerization of organic materials on the outside window surface. These problems may be overcome by proper cleaning of the
window. A small bottle of polishing powder (1 micron aluminum oxide powder) and cotton-tipped applicators along with polishing
instructions are included with the light source unit.
Before using the light source, inspect the window for any signs of gross contamination, such as fingerprints. If there are or if, after
operating the light source, you notice a drop in output then clean the window with polishing powder (aluminum oxide) following
these instructions. All cleaning operations are carried out with cotton-tipped applicators or with lint-free tissues.
1. Apply the polishing powder to an applicator tip.
2. Polish the window by firmly pressing the applicator against the center of the window and, in a circular motion, work your
way outwards to the edge of the window. You should notice a frictional resistance as you slide across the window.
3. Repeat, using a new applicator, until there is no evidence of a film on the window when it is viewed with reflected light
and there has been a noticeable decrease in the frictional resistance.
4. Wipe away excess powder with a dry applicator. A few specks of powder on the window will have a negligible effect on
the optical transmission.
5. Remove the final bits of powder by directing a stream of ultra-high purity helium, nitrogen or argon across the window.
Never use a lab source of air for this process because it may contain compressor oil.
For quick cleaning, it is acceptable to wipe the window with isopropanol or methanol using a cotton-tipped applicator. This will only
work for light cleaning (light finger prints, dust, light smudges) and not more serious window contaminants.
Troubleshooting
Light Source Does Not Start
The first thing to check for in this case is whether all cables are securely connected. Make sure the light source’s DE9 cable is
securely fastened to its rear panel and also the breakout box, the power cable is securely plugged into the breakout box, and the
power switch is positioned to the “ON” state. You can check if the main power is active by checking if the green LED indicator on
the power switch of the breakout box is lit, and also whether the green LED on the power supply transformer is lit.
It is often observed that after sitting for extended periods of time the light source may be hard to start. Refer to the section titled
“Operating Instructions” and follow the starting procedure for further advice.
As a last resort you can start the light source by holding a Tesla coil in the vicinity of the light source window. BE VERY
CAREFUL that the coil does not arc to the window or light source body as this can damage the window, the light source
electronics, and even the power supply.
Light Source Intensity Appears to Drop
This is most often caused by contamination of the outside of the light source window, and can occur in vacuum systems with 10-7
Torr total pressure and 10-9 Torr partial pressure of organic materials. The light source window should be cleaned according to
the instructions found in the section titled “Window Cleaning Instructions”.
Problem with Software / Telemetry / RS-232 Port
Please refer to the software manual.
